Power Level：100W,300W,600W,1200W,2400W
Output Frequency：13.56MHz
Application：Plasma cleaning,Plasma etching,Plasma PECVD and Plasma sterilization…
Power Level：100W,300W,600W,1200W,2400W
Output Frequency：13.56MHz
Application：Plasma cleaning,Plasma etching,Plasma PECVD and Plasma sterilization…
RF Power Source
RF Auto Tuner
Solid state design in all RF amplifier stages and a built in DDS signal source,it provides everything for a complete and reliable,finely controlled RF power delivery system.
Front panel offers a LCD display of ForwarPower,ReflectedPower,LoadPower,Temperature and Frequency.It can adjust theOutput power by using the Edit Knob on the front board.It is compatible with most signal and function generators,computer synthesizer cards and it accurately reproduces all waveforms.It works with RF Auto Tuner,broadmatching,high speed.
13.56MHz RF Power Source
Model | Output Power | Size(H*W*L,mm） | Weight |
AG0113 | 100W | 133*222*381 | 7.0kg |
AG0313 | 300W | 133*222*381 | 7.0kg |
AG0613 | 600W | 133*222*381 | 7.0kg |
AG1213W | 1200W | 133*222*406 | 7.0kg |
AG2413W | 2400W | 133*483*320 | 12.0kg |
13.56MHz RF Auto Tuner
Model | Output Power | Size(H*W*L,mm） | Weight |
AIT-600-03 | 300W | 133*222*381 | 5.0kg |
AIT-600-06R | 600W | 152*305*406 | 7.0kg |
AIT-600-12R | 1200W | 152*305*406 | 7.0kg |
AIT-600-24R | 2400W | 152*305*406 | 7.0kg |
